The particle accelerator is meant to produce the ultraviolet radiation used in the EUV lithography. It's half avoiding ASML patents and half for future proofing since it has some benefits to the laser-tindroplet method of UV production in future speculative lithography processes.
2 Comments
Nioxic@lemmy.dbzer0.com · 4 pts · 2y
How does a particle accellerator power a chip factory??
Korkki@lemmy.world · 4 pts · 2y
The particle accelerator is meant to produce the ultraviolet radiation used in the EUV lithography. It's half avoiding ASML patents and half for future proofing since it has some benefits to the laser-tindroplet method of UV production in future speculative lithography processes.